Scholarworks@UNIST: Browsing Repository

Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films File File

Son, Yeseul , Kim, Sang Bok , Mohapatra, Debananda , Cheon, Taehoon , Kim, Soo-Hyun

Article Issue Date2025-08 View106

Assessment of cross-type optical particle separation system File

Lee, Kang Soo , Yoon, Sang Youl , Kim, Sang Bok , Lee, Kyung Heon , Sung, Hyung Jin , Kim, Sang Soo

Article Issue Date2012-07 View122

Atomic-scale homogeneous PtRu alloy thin films prepared by atomic layer modulation (ALM)

Son, Yeseul , Kim, Sang Bok , Cheon, Taehoon , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-07 View64

Behavior of Double Emulsions in a Cross-Type Optical Separation System File

Lee, Kyung Heon , Kim, Sang Bok , Yoon, Sang Youl , Lee, Kang Soo , Jung, Jin Ho , Sung, Hyung Jin

Article Issue Date2012-05 View177

Comparative analysis of CeO₂ thin films deposited by plasma-enhanced and thermal atomic layer deposition using a novel liquid Ce precursor

Seo, Yewon , Kim, Sang Bok , Moon, Sola , Yoon, Tae-Sik , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View29

Comparative study of CeO₂ thin films prepared by plasma-enhanced and thermal atomic layer deposition using a new liquid Ce precursor

Seo, Yewon , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-24 View5

Development of highly conductive NbCx thin films using PEALD for diffusion barrier applications in Cu and Ru interconnects

Park, Chaehyun , Hong, Tae Eun , Kim, Sang Bok , Bae, Jong-Seong , Kweon, Minjeong , Kim, Soo-Hyun

Conference Paper Issue Date2024-11-20 View62

Dynamic manipulation of particles via transformative optofluidic waveguides File File

Lee, Kang Soo , Lee, Kyung Heon , Kim, Sang Bok , Ha, Byung Hang , Jung, Jin Ho , Sung, Hyung Jin , Kim, Sang Soo

Article Issue Date2015-10 View111

Enhanced functional properties of ABC-type atomic layer deposited Ru thin films for advanced Cu alternative nanoscale interconnects File File

Kim, Jeongha , Mohapatra, Debananda , Son, Yeseul , Jang, Jae Min , Kim, Sang Bok , Hong, Tae Eun , Cheon, Taehoon , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2026-03 View8

Enhancement by optical force of separation in pinched flow fractionation File

Lee, Kyung Heon , Kim, Sang Bok , Lee, Kang Soo , Sung, Hyung Jin

Article Issue Date2011-01 View98

Formation of Bottomless Barrier using Area-Selective Deposition with Small Molecule Inhibitor

Kim, Minwoo , Son, Yeseul , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View14

Growth of High-Quality InN Thin Films by Plasma-Enhanced ALD Using a Novel Indium Precursor and NH3 Plasma

Kim, Yejun , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View19

Highly conductive ALD-WCx thin films using a novel fluorine-free W precursor for Cu & Ru interconnects

Seo, Dongbeom , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View9

Highly Conductive ALD-WCₓ Ultrathin Diffusion Barriers for Cu and Ru Interconnects

Seo, Dongbeom , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-11-06 View14

Highly conductive niobium carbide thin films prepared by plasma enhanced atomic layer deposition as diffusion barriers for Cu and Ru interconnects

Park, Chaehyun , Kweon, Minjeong , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2024-06-24 View61

Improved performance of atomic layer deposited Ru thin film prepared by 6-step ALD process as a Cu alternative interconnect

Kim, Jeongha , Kim, Sang Bok , Cheon, Taehoon , Son, Yeseul , Kim, Soo-Hyun

Conference Paper Issue Date2024-06-24 View98

Improved properties of atomic layer deposited Ru films by providing additional reactant for Cu alternative interconnects

Kim, Jeongha , Son, Yeseul , Cheon, Taehoon , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-06 View71

Improved Properties of Atomic Layer Deposited Ru Films by Providing Additional Reactant for Cu Alternative Nanoscale Interconnects File

Kim, Jeongha , Mohapatra, Debananda , Son, Yeseul , Jang, Jae Min , Kim, Sang Bok , Cheon, Taehoon , Shong, Boggeun , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-04 View17

Impurity Reduction Leading to Enhanced Properties in Atomic Layer Deposited Ru Films by Introducing Additional Reactant for Cu Alternative Interconnects

Son, Yeseul , Hong, Tae Eun , Kim, Sang Bok , Bae, Jong-Seong , Kim, Jeongha , Kim, Soo-Hyun

Conference Paper Issue Date2024-11-20 View63

Mutifunctional Ru/ZnO Bilayer for Sustainable Cu Interconnects using Area-Selective Atomic Layer Deposition of barrier with Small Molecule Inhibitor

Kim, Minwoo , Son, Yeseul , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-24 View13

New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition File

Ansari, Mohd Zahid , Janicek, Petr , Namgung, Sook , Kim, Hyangil , Nandi, Dip K. , Cheon, Taehoon , Siddiqui, Masoom Raza , Imran, Muhammad , Jang, Yujin , Bae, Jong-Seong , et al

Article Issue Date2024-03 View125

Optofluidic particle manipulation in a liquid-core/liquid-cladding waveguide File File

Lee, Kang Soo , Yoon, Sang Youl , Lee, Kyung Heon , Kim, Sang Bok , Sung, Hyung Jin , Kim, Sang Soo

Article Issue Date2012-07 View98

Plasma-enhanced atomic layer deposited highly conductive niobium carbide thin films as next-generation diffusion barriers for Cu and Ru interconnects

Kim, Soo-Hyun , Kim, Sang Bok , Kweon. Minjeong , Park, Chaehyun

Conference Paper Issue Date2024-10-18 View83

Plasma-enhanced atomic layer deposition of niobium carbide using a new Nb precursor and H2 Plasma and its application to diffusion barrier for Cu and Ru interconnects

Park, Chaehyun , Kim, Sang Bok , Kweon, Minjeong , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-06 View50

Plasma-Enhanced Atomic Layer Deposition of Yttrium Carbide Thin Films as a Promising Transition Metal Carbide for Dual Diffusion Barrier in Cu and Ru Metallization File

Kweon, Minjeong , Park, Chaehyun , Mohapatra, Debananda , Kim, Sang Bok , Bae, Jong-Seong , Cheon, Taehoon , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-04 View14

Radiation forces on a microsphere in an arbitrary refractive index profile File

Lee, Kang Soo , Yoon, Sang Youl , Lee, Kyung Heon , Kim, Sang Bok , Sung, Hyung Jin , Kim, Sang Soo

Article Issue Date2012-03 View114

Refractive-index-based optofluidic particle manipulation File

Lee, Kang Soo , Lee, Kyung Heon , Kim, Sang Bok , Jung, Jin Ho , Ha, Byung Hang , Sung, Hyung Jin , Kim, Sang Soo

Article Issue Date2013-08 View104

Three-dimensional microfluidic liquid-core/liquid-cladding waveguide File

Lee, Kang Soo , Kim, Sang Bok , Lee, Kyung Heon , Sung, Hyung Jin , Kim, Sang Soo

Article Issue Date2010-07 View86

Yttrium carbide thin film as an emerging transition metal carbide Prepared by plasma-enhanced atomic layer deposition for Dual diffusion barrier applications into Cu and Ru metallization File

Kweon, Minjeong , Park, Chaehyun , Mohapatra, Debananda , Kim, Sang Bok , Bae, Jong-Seong , Cheon, Taehoon , Kim, Soo-Hyun

Article Issue Date2025-08 View138

YxC thin films prepared by plasma enhanced atomic layer deposition as a diffusion barrier and glue layer for Cu & Ru interconnects

Kweon. Minjeong , Park, Chaehyun , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-06 View71

Zirconium Carbide (ZrCx) Thin Films as Next-generation Diffusion Barriers for Cu and Ru Interconnects Prepared by Plasma Enhanced Atomic Layer Deposition

Kweon, Minjeong , Park, Chaehyun , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-24 View13

Zirconium Carbide (ZrCx) Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition as a diffusion barrier for Ru & Cu metallization

Kweon, Minjeong , Park, Chaehyun , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2024-10-19 View67

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