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- Yoon, Tae-Sik
- Nano Semiconductor Research Lab.
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Comparative analysis of CeO₂ thin films deposited by plasma-enhanced and thermal atomic layer deposition using a novel liquid Ce precursor
- Author(s)
- Seo, Yewon, Kim, Sang Bok, Moon, Sola, Yoon, Tae-Sik, Kim, Soo-Hyun
- Issued Date
- 2025-12-11
- Citation
- The 14th International Conference on Advanced Materials and Devices (ICAMD 2025)
- Publisher
- Applied Physics Division, Korean Physical Society (KPS)
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