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- Kim, Soo-Hyun
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Highly Conductive ALD-WCₓ Ultrathin Diffusion Barriers for Cu and Ru Interconnects
- Author(s)
- Seo, Dongbeom, Kim, Sang Bok, Kim, Soo-Hyun
- Issued Date
- 2025-11-06
- Citation
- 제4회 2025 한국표면분석학회 종합학술대회
- Publisher
- 한국표면분석학회
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