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A bilayer diffusion barrier of ALD-Ru/ALD-TaCN for direct plating of Cu File File

Kim, Soo-Hyun , Kim, Hyun Tae , Yim, Sung-Soo , Lee, Do-Joong , Kim, Ki-Su , Kim, Hyun-Mi , Kim, Ki-Bum , Sohn, Hyunchul

Article Issue Date2008-06 View140

A bilayer diffusion barrier of Ru/WSixNy for advanced Cu interconnects File

Eom, Tae-Kwang , Sari, Windu , Cheon, Taehoon , Kim, Soo-Hyun , Kim, Woo Kyoung

Article Issue Date2012-10 View87

A-site effects of titanate-perovskite (ATiO3)-based catalysts on dehydrogenation of N-heterocyclic molecules File

Park, Byung Gwan , Lee, Hyeongeon , Lee, Jihyeon , Nam, Eonu , Bae, Jong-Seong , An, Kwangjin

Article Issue Date2024-01 View171

Atomic Layer Deposited RuO2 Diffusion Barrier for Next Generation Ru-Interconnects File

Kim, Youn-Hye , Kim, Minsu , Kotsugi, Yohei , Cheon, Taehoon , Mohapatra, Debananda , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Ramesh, Rahul , An, Ki-Seok , et al

Article Issue Date2022-10 View127

Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen File

Park, Na-Yeon , Kim, Minsu , Kim, Youn-Hye , Ramesh, Rahul , Nandi, Dip K. , Tsugawa, Tomohiro , Shigetomi, Toshiyuki , Suzuki, Kazuharu , Harada, Ryosuke , Kim, Miso , et al

Article Issue Date2022-02 View189

Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant File

Hong, Tae Eun , Mun, Ki-Yeung , Choi, Sang-Kyung , Park, Ji-Yoon , Kim, Soo-Hyun , Cheon, Taehoon , Kim, Woo Kyoung , Lim, Byoung-Yong , Kim, Sunjung

Article Issue Date2012-07 View135

Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects File

Cheon, Taehoon , Choi, Sang-Hyeok , Kim, Soo-Hyun , Kang, Dae-Hwan

Article Issue Date2011-03 View92

Characterization of a Ru-based ternary-oxide thin film for a diffusion barrier File

Hong, Tae Eun , Jeong, E. D. , Byeon, M. R. , Kang, Y. B. , Yang, Ho-Soon , Kim, Soo-Hyun

Article Issue Date2012-09 View102

Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization File

Nakazawa, Tatsuya , Kim, Donghyun , Kim, Jaehyeok , Kotsugi, Yohei , Cheon, Taehoon , Chung, Seung-Min , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2022-09 View106

Direct Electrodeposition of Cu on Ru-Al2O3 Layer File

Kim, Myung Jun , Kim, Hoe Chul , Kim, Soo-Hyun , Yeo, Seungmin , Kwon, Oh Joong , Kim, Jae Jeong

Article Issue Date2013-01 View108

Dye regeneration and charge recombination in dye-sensitized solar cells with ferrocene derivatives as redox mediators File

Daeneke, Torben , Mozer, Attila J. , Kwon, Tae-Hyuk , Duffy, Noel W. , Holmes, Andrew B. , Bach, Udo , Spiccia, Leone

Article Issue Date2012-05 View148

Effects of AlOx incorporation into atomic layer deposited Ru thin films: Applications to Cu direct plating technology File

Hong, Tae Eun , Cheon, Taehoon , Kim, Soo-Hyun , Kim, Jeong-Kyu , Park, Young-Bae , Kwon, Oh Joong , Kim, Myung Jun , Kim, Jae Jeong

Article Issue Date2013-12 View92

Effects of the TiN diffusion barrier and post-annealing between Ru and SiO2 films on the interfacial adhesion energy for advanced interconnections File

Son, Kirak , Kim, Gahui , Jeong, Daeyoon , Kim, Soo-Hyun , Park, Young-Bae

Article Issue Date2025-03 View119

Formation Mechanism, Growth Kinetics, and Stability Limits of Graphene Adlayers in Metal-Catalyzed CVD Growth File

Wang, Zhu-Jun , Ding, Feng , Eres, Gyula , Antonietti, Markus , Schloegl, Robert , Willinger, Marc Georg

Article Issue Date2018-07 View134

Improvement of the Diffusion Barrier Performance of Ru by Incorporating a WNx Thin Film for Direct-Plateable Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Jeon, Chan-Wook , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-04 View113

Interfacial Adhesion Energy of Ru-AlO Thin Film Deposited by Atomic Layer Deposition between Cu and SiO2: Effect of the Composition of Ru-AlO Thin Film File

Kim, Jeong-Kyu , Cheon, Tae-Hoon , Kim, Soo-Hyun , Park, Young-Bae

Article Issue Date2012-05 View77

Nucleation-controlled growth of Cu thin films electrodeposited directly on ALD Ru diffusion barrier in additive-free electrolyte for Cu interconnect File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2023-04 View129

P and Mo Dual Doped Ru Ultrasmall Nanoclusters Embedded in P-Doped Porous Carbon toward Efficient Hydrogen Evolution Reaction File

Li, Chuang , Jang, Haeseong , Liu, Shangguo , Kim, Min Gyu , Hou, Liqiang , Liu, Xien , Cho, Jaephil

Article Issue Date2022-06 View170

Plasma-free atomic layer deposition of Ru thin films using H-2 molecules as a nonoxidizing reactant File

Lee, Seung-Joon , Kim, Soo-Hyun , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , Kim, Sangdeok , Yeom, Seungjin , Lee, Do-Joong

Article Issue Date2016-05 View111

Potentiostatically Controlled Olefin Metathesis File File

Ahumada, Guillermo , Ryu, Yeonkyeong , Bielawski, Christopher W.

Article Issue Date2020-05 View144

Self‐Formation of a Ru/ZnO Multifunctional Bilayer for the Next‐Generation Interconnect Technology via Area‐Selective Atomic Layer Deposition File File

Mori, Yuki , Cheon, Taehoon , Kotsugi, Yohei , Kim, Youn‐Hye , Park, Yejin , Ansari, Mohd Zahid , Mohapatra, Debananda , Jang, Yujin , Bae, Jong‐Seong , Kwon, Woobin , et al

Article Issue Date2023-08 View136

Sodium-Decorated Amorphous/Crystalline RuO2 with Rich Oxygen Vacancies: A Robust pH-Universal Oxygen Evolution Electrocatalyst File

Zhang, Lijie , Jang, Haeseong , Liu, Huihui , Kim, Min Gyu , Yang, Dongjiang , Liu, Shangguo , Liu, Xien , Cho, Jaephil

Article Issue Date2021-08 View143

Tandem catalysis: The sequential mediation of olefin metathesis, hydrogenation, and hydrogen transfer with single-component Ru complexes File

Louie, J , Bielawski, CW , Grubbs, RH

Article Issue Date2001-11 View86

The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect File

Mun, Ki-Yeung , Hong, Tae Eun , Cheon, Taehoon , Jang, Yujin , Lim, Byoung-Yong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2014-07 View93

Thermodynamic assessment of carbazole-based organic polycyclic compounds for hydrogen storage applications via a computational approach File

Shin, Byeong Soo , Yoon, Chang Won , Kwak, Sang Kyu , Kang, Jeong Won

Article Issue Date2018-07 View78

Thermodynamic efficiencies of hydrogen storage processes using carbazole-based compounds File

Choi, In Young , Shin, Byeong Soo , Kwak, Sang Kyu , Kang, Kyung Soo , Yoon, Chang Won , Kang, Jeong Won

Article Issue Date2016-06 View115

Zeolitic Imidazolate Framework-Derived Ru/RuO2-Co3O4 Catalyst for Methanol Oxidation Reaction in Alkaline Media File

Khanam, Salma A. , Kim, Donguk , Park, Young-Bin , Das, Amit , Sarmah, Kangkan , Guha, Ankur K. , Bania, Kusum K.

Article Issue Date2025-09 View128

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