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Shin, Heungjoo
Micro/Nano Integrated Systems (MNIS) Lab
Research Interests
  • Carbon-MEMS
  • Nanofabrication
  • Gas sensors
  • Biosensors
  • Electrochemical sensors
  • SPM

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Bitmap-assisted focused ion beam fabrication of combined atomic force scanning electrochemical Microscopy probes

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Title
Bitmap-assisted focused ion beam fabrication of combined atomic force scanning electrochemical Microscopy probes
Author
Moon, Jong-SeokShin, HeungjooMizaikoff, BorisKranz, Christine
Keywords
Bifunctional scanning probes; Focused ion beam; Nanoelectrodes
Issue Date
2007-09
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.51, no.3, pp.920 - 924
Abstract
Bitmap assisted focused-ion-beam (FIB) milling for the fabrication of combined atomic force scanning electrochemical microscopy (AFM-SECM) probes is presented. This technique facilitates the integration of frame-shaped nanoelectrodes recessed from the AFM tip. Thereby, the fabrication process for bifunctional AFM-SECM tips is significantly simplified while maintaining high reproducibility with reduced FIB milling time/cost. Additionally, different electrode geometries (frame- and disk-shaped) and a wide variety of ratios between electrode size and re-shaped AFM tip length can be easily maintained. Disk nanoelectrodes can be integrated with radii down to 50 nm after appropriate pre-modification of the AFM tip. Characterization and performance of bifunctional probes are demonstrated by using cyclic voltammetry at the tip-integrated electrodes and simultaneous imaging in contact mode AFM and feedback-mode SECM operation. Atomic force microscopy, AFM, Scanning electrochemical microscopy, SECM,.
URI
https://scholarworks.unist.ac.kr/handle/201301/7253
ISSN
0374-4884
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