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Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition File

Kim, Kangsik , Oh, Il-Kwon , Kim, Hyungjun , Lee, Zonghoon

Article Issue Date2017-12 View151

Catalytic chemical vapor deposition of large-area uniform two-dimensional molybdenum disulfide using sodium chloride File

Song, Jeong-Gyu , Ryu, Gyeong Hee , Kim, Youngjun , Woo, Whang Je , Ko, Kyung Yong , Kim, Yongsung , Lee, Changseung , Oh, Il-Kwon , Park, Jusang , Lee, Zonghoon , et al

Article Issue Date2017-11 View274

Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors File

Jung, Hanearl , Oh, Il-Kwon , Yeo, Seungmin , Kim, Hyungjun , Lee, Su Jeong , Kim, Yun Cheol , Myoung, Jae-Min , Kim, Soo-Hyun , Lim, Jun Hyung , Lee, Sunhee

Article Issue Date2017-05 View120

Dysprosium Incorporation for Phase Stabilization of Atomic-Layer- Deposited HfO2 Thin Films File

Lee, Yujin , Kim, Kangsik , Lee, Zonghoon , Lee, Hong-Sub , Lee, Han-Bo-Ram , Kim, Woo-Hee , Oh, Il-Kwon , Kim, Hyungjun

Article Issue Date2023-03 View147

Effect of Al2O3 deposition on performance of top-gated monolayer MoS2 based field effect transistor File

Song, Jeong-Gyu , Kim, Seok Jin , Woo, Whang Je , Kim, Youngjin , Oh, Il-Kwon , Ryu, Gyeong Hee , Lee, Zonghoon , Lim, Jun Hyung , Park, Jusang , Kim, Hyungjun

Article Issue Date2016-10 View155

Fabrication of Transferable Al2O3 Nanosheet by Atomic Layer Deposition for Graphene FET File

Jung, Hanearl , Park, Jusang , Oh, Il-Kwon , Choi, Taejin , Lee, Sanggeun , Hong, Juree , Lee, Taeyoon , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2014-02 View103

Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition File

Oh, Il-Kwon , Kim, Kangsik , Lee, Zonghoon , Ko, Kyung Yong , Lee, Chang-Wan , Lee, Su Jeong , Myung, Jae Min , Lansalot-Matras, Clement , Noh, Wontae , Dussarrat, Christian , et al

Article Issue Date2015-01 View119

Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes File File

Lee, Jae Hwan , Park, Bo-Eun , Thompson, David , Choe, Myeonggi , Lee, Zonghoon , Oh, Il-Kwon , Kim, Woo-Hee , Kim, Hyungjun

Article Issue Date2020-05 View149

In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides File

Oh, Il-Kwon , Kim, Kangsik , Lee, Zonghoon , Song, Jeong-Gyu , Lee, Chang Wan , Thompson, David , Lee, Han-Bo-Ram , Kim, Woo-Hee , Maeng, Wan Joo , Kim, Hyungjun

Article Issue Date2015-05 View109

Indium Tin Oxide Vertical Channel Transistors for Scaled 4F2 2T0C Gain Cell Memory With Etched Sidewall Cleaning File

Gu, Hyeonho , Jung, Haksoon , Park, Minho , Lee, Hyeonjin , Choi, Ae Rim , Oh, Il-Kwon , Zhao, Yanfeng , Kim, Byungjo , Kim, Jungsik , Jang, Byung Chul , et al

Article Issue Date2026-04 View1

Nanoscale Hydrophobic Coating by Atomic Layer Deposition Rare Earth Oxides

Lee, Zonghoon , Oh, Il-Kwon , Kim, Kangsik , Ko, Kyeongyong , Lee, Seojung , Myung, JM , Lansalot-matras, Clement , Noh, Wontae , Kim, Hyungjoon , Lee, Hanboram

Conference Paper Issue Date2015-04-10 View85

Nucleation and Growth of the HfO2 Dielectric Layer for Graphene-Based Devices File

Oh, Il-Kwon , Tanskanen, Jukka , Jung, Hanearl , Kim, Kangsik , Lee, Mi Jin , Lee, Zonghoon , Lee, Seoung-Ki , Ahn, Jong-Hyun , Lee, Chang Wan , Kim, Kwanpyo , et al

Article Issue Date2015-09 View139

Reaction Mechanism of Pt Atomic Layer Deposition on Various Textile Surfaces File

Oh, Il-Kwon , Park, Jong Seo , Khan, Mohammad Rizwan , Kim, Kangsik , Lee, Zonghoon , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2019-11 View101

Recent Advances in Triboelectric Nanogenerators: From Technological Progress to Commercial Applications File

Choi, Dongwhi , Lee, Younghoon , Lin, Zong-Hong , Cho, Sumin , Kim, Miso , Ao, Chi Kit , Soh, Siowling , Sohn, Changwan , Jeong, Chang Kyu , Lee, Jeongwan , et al

Article Issue Date2023-06 View121

Significant Enhancement of the Dielectric Constant through the Doping of CeO2 into HfO2 by Atomic Layer Deposition File

Kim, Woo-Hee , Kim, Min-Kyu , Oh, Il-Kwon , Maeng, Wan Joo , Cheon, Taehoon , Kim, Soo-Hyun , Noori, Atif , Thompson, David , Chu, Schubert , Kim, Hyungjun

Article Issue Date2014-04 View97

Surface Energy Change of Atomic-Scale Metal Oxide Thin Films by Phase Transformation File

Oh, Il-Kwon , Zeng, Li , Kim, Jae-Eun , Park, Jong-Seo , Kim, Kangsik , Lee, Hyunsoo , Seo, Seunggi , Khan, Mohammad Rizwan , Kim, Sangmo , Park, Chung Wung , et al

Article Issue Date2020-01 View93

Surface treatment process applicable to next generation graphene-based electronics File

Kim, Ki Seok , Hong, Hyo-Ki , Jung, Haneal , Oh, Il-Kwon , Lee, Zonghoon , Kim, Hyungjun , Yeom, Geun Young , Kim, Kyong Nam

Article Issue Date2016-08 View82

Synthesis of wafer-scale uniform molybdenum disulfide films with control over the layer number using a gas phase sulfur precursor File

Lee, Youngbin , Lee, Jinhwan , Bark, Hunyoung , Oh, Il-Kwon , Ryu, Gyeong Hee , Lee, Zonghoon , Kim, Hyungjun , Cho, Jeong Ho , Ahn, Jong-Hyun , Lee, Changgu

Article Issue Date2014-03 View123

Unveiling the Effect of Superlattice Interfaces and Intermixing on Phase Change Memory Performance File

Khan, Asir Intisar , Wu, Xiangjin , Perez, Christopher , Won, Byoungjun , Kim, Kangsik , Ramesh, Pranav , Kwon, Heungdong , Tung, Maryann C. , Lee, Zonghoon , Oh, Il-Kwon , et al

Article Issue Date2022-07 View104

Very high frequency plasma reactant for atomic layer deposition File

Oh, Il-Kwon , Yoo, Gilsang , Yoon, Chang Mo , Kim, Tae Hyung , Yeom, Geun Young , Kim, Kangsik , Lee, Zonghoon , Jung, Hanearl , Lee, Chang Wan , Kim, Hyungjun , et al

Article Issue Date2016-11 View193

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