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Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor File

Hidayat, Romel , Chowdhury, Tanzia , Kim, Yewon , Kim, Seongyoon , Mayangsari, Tirta Rona , Kim, Soo-Hyun , Lee, Won-Jun

Article Issue Date2021-02 View7

Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization File

Nakazawa, Tatsuya , Kim, Donghyun , Kim, Jaehyeok , Kotsugi, Yohei , Cheon, Taehoon , Chung, Seung-Min , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2022-09 View14

Effects of AlOx incorporation into atomic layer deposited Ru thin films: Applications to Cu direct plating technology File

Hong, Tae Eun , Cheon, Taehoon , Kim, Soo-Hyun , Kim, Jeong-Kyu , Park, Young-Bae , Kwon, Oh Joong , Kim, Myung Jun , Kim, Jae Jeong

Article Issue Date2013-12 View1

Effects of annealing on the properties of atomic layer deposited Ru thin films deposited by NH3 and H-2 as reactants File

Lee, Seung-Joon , Kim, Soo-Hyun

Article Issue Date2016-08 View2

Electrical and physical characteristics for crystalline atomic layer deposited beryllium oxide thin film on Si and GaAs substrates File

Yum, J. H. , Akyol, T. , Lei, M. , Ferrer, D. A. , Hudnall, Todd W. , Downer, M. , Bielawski, C. W. , Bersuker, G. , Lee, J. C. , Banerjee, S. K.

Article Issue Date2012-01 View5

Enhanced thermal stability of Bi2Te3-based alloys via interface engineering with atomic layer deposition File

Lim, Sang-Soon , Kim, Kwang-Chon , Jeon, Hansol , Kim, Ju-Young , Kang, Jun-Yun , Park, Hyung-Ho , Baek, Seung-Hyub , Kim, Jin-Sang , Kim, Seong Keun

Article Issue Date2020-08 View8

Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition File

Park, Ji-Yoon , Yeo, Seungmin , Cheon, Taehoon , Kim, Soo-Hyun , Kim, Min-Kyu , Kim, Hyungjun , Hong, Tae Eun , Lee, Do-Joong

Article Issue Date2014-10 View5

Growth of n-type organic semiconductor for low-voltage transistors based on an ALD grown Al2O3 gate dielectric File

Na, Hanah , Shin, Tae Joo , Sim, Kyoseung , Chirawatkul, Prae , Kim, Sangwook , Heo, Kwan-Jun , Kim, Sung-Jin , Pyo, Seungmoon

Article Issue Date2013-12 View1

High efficiency n-ZnO/p-Si core-shell nanowire photodiode based on well-ordered Si nanowire array with smooth surface File

Ko, Kyung Yong , Kang, Hyemin , Kim, Jungkil , Lee, Woo , Lee, Hee Sung , Im, Seongil , Kang, Ji Yeon , Myoung, Jae-Min , Kim, Han-Gil , Kim, Soo-Hyun , et al

Article Issue Date2014-11 View1

High performance inverted polymer solar cells using ultrathin atomic layer deposited TiO2 films File

Cho, Hyun-Soo , Shin, Nara , Kim, Kyungkon , Kim, BongSoo , Kim, Do-Heyoung

Article Issue Date2015-09 View5

Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu File

Jang, Yujin , Kim, Jun Beom , Hong, Tae Eun , Yeo, So Jeong , Lee, Sunju , Jung, Eun Ae , Park, Bo Keun , Chung, Taek-Mo , Kim, Chang Gyoun , Lee, Do-Joong , et al

Article Issue Date2016-04 View9

Highly-conformal p-type copper(I) oxide (Cu2O) thin films by atomic layer deposition using a fluorine-free amino-alkoxide precursor File

Kim, Hangil , Lee, Min Young , Kim, Soo-Hyun , Bae, So Ik , Ko, Kyung Yong , Kim, Hyungjun , Kwon, Kyeong-Woo , Hwang, Jin-Ha , Lee, Do-Joong

Article Issue Date2015-09 View3

Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films File

Choi, Taejin , Yeo, Seungmin , Song, Jeong-Gyu , Seo, Seunggi , Jang, Byeonghyeon , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2018-06 View2

Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes File

Lee, Jae Hwan , Park, Bo-Eun , Thompson, David , Choe, Myeonggi , Lee, Zonghoon , Oh, Il-Kwon , Kim, Woo-Hee , Kim, Hyungjun

Article Issue Date2020-05 View9

Improvement in performance of inverted polymer solar cells by interface engineering of ALD ZnS on ZnO electron buffer layer File

Zafar, Muhammad , Kim, BongSoo , Kim, Do-Heyoung

Article Issue Date2019-07 View4

In-Zn-Sn-O thin film based transistor with high-k HfO2 dielectric File

Bak, Yang Gyu , Park, Ji Woon , Park, Ye Jin , Ansari, Mohd Zahid , NamGung, Sook , Cho, Bo Yeon , Kim, Soo-Hyun , Lee, Hee Young

Article Issue Date2022-07 View9

Influence of post-annealing on structural, optical and electrical properties of tin nitride thin films prepared by atomic layer deposition File

Ansari, Mohd Zahid , Janicek, Petr , Nandi, Dip K. , Palka, Karel , Slang, Stanislav , Kim, Deok Hyun , Cheon, Taehoon , Kim, Soo-Hyun

Article Issue Date2021-02 View5

Low temperature atomic layer deposited molybdenum nitride-Ni-foam composite: An electrode for efficient charge storage File

Nandi, Dip K. , Sahoo, Sumanta , Kim, Tae Hyun , Cheon, Taehoon , Sinha, Soumyadeep , Rahul, Ramesh , Jang, Yujin , Bae, Jong-Seong , Heo, Jaeyeong , Shim, Jae-Jin , et al

Article Issue Date2018-08 View5

Low-temperature growth of crystalline Tin(II) monosulfide thin films by atomic layer deposition using a liquid divalent tin precursor File

Ansari, Mohd Zahid , Janicek, Petr , Nandi, Dip K. , Slang, Stanislav , Bouska, Marek , Oh, Hongjun , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2021-11 View7

New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition File

Ansari, Mohd Zahid , Janicek, Petr , Namgung, Sook , Kim, Hyangil , Nandi, Dip K. , Cheon, Taehoon , Siddiqui, Masoom Raza , Imran, Muhammad , Jang, Yujin , Bae, Jong-Seong , et al

Article Issue Date2024-03 View3

Nitrogen-doped ZnO/n-Si core-shell nanowire photodiode prepared by atomic layer deposition File

Ko, Kyung Yong , Kang, Hyemin , Lee, Wonseon , Lee, Chang-Wan , Park, Jusang , Lee, Hee Sung , Im, Seongil , Kim, Han-Gil , Kim, Soo-Hyun , Min, Byung-Wook , et al

Article Issue Date2015-05 View4

Non-volatile charge-trap memory characteristics with low-temperature atomic layer deposited HfO2-x charge-trap layer and interfacial tunneling oxide formed by UV/ozone treatment File

Han, Jimin , Jeong, Boyoung , Sahu, Dwipak Prasad , Kim, Hyun-Mi , Yoon, Tae-Sik

Article Issue Date2023-08 View9

Phase-controlled growth of cobalt oxide thin films by atomic layer deposition File

Jung, Soonyoung , Nandi, Dip K. , Yeo, Seungmin , Kim, Hyungjun , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2018-03 View5

Polarization-Induced Two-Dimensional electron gas at BeO/ZnO interface File

Jang, Yoonseo , Jung, Dohwan , Sultane, Prakash R. , Bielawski, Christopher W. , Oh, Jungwoo

Article Issue Date2022-10 View10

Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2-and 3-step atomic layer deposition process File

Lee, Jin-Hyeok , Hidayat, Romel , Ramesh, Rahul , Roh, Hyeonsu , Nandi, Dip K. , Lee, Won-Jun , Kim, Soo-Hyun

Article Issue Date2022-03 View12

Preparation of wafer-scale highly conformalamorphous hafnium dioxide thin films by atomic layer deposition using a thermally stable boratabenzene ligand-containing hafnium precursor File

Ansari, Mohd Zahid , Janicek, Petr , Park, Ye Jin , NamGung, Sook , Cho, Bo Yeon , Nandi, Dip K. , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Cheon, Taehoon , et al

Article Issue Date2023-05 View6

Quantitative evaluation of the antibacterial factors of ZnO nanorod arrays under dark conditions: Physical and chemical effects on Escherichia coil inactivation File

Jeong, Eunhoo , Ul Kim, Chan , Byun, Jeehye , Lee, Jiho , Kim, Hyung-Eun , Kim, Eun-Ju , Choi, Kyoung Jin , Hong, Seok Won

Article Issue Date2020-04 View16

Rate performance enhancement of lithium-ion battery using precise thickness-controllable-carbon-coated titanium dioxide nanowire array electrode via atomic layer deposition File

Choi, Taejin , Kim, Seong Dae , Yeo, Seungmin , Cheon, Taehoon , Kim, Soo-Hyun , Ahn, Jong-Hyun , Kim, Hyungjun

Article Issue Date2020-02 View5

Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen File

Yeo, Seungmin , Park, Ji-Yoon , Lee, Seung-Joon , Lee, Do-Joong , Seo, Jong Hyun , Kim, Soo-Hyun

Article Issue Date2015-04 View6

Self-reconstructed interlayer derived by in-situ Mn diffusion from La0.5Sr0.5MnO3 via atomic layer deposition for an efficient bi-functional electrocatalyst File

Seong, Arim , Kim, Jeongwon , Kwon, Ohhun , Jeong, Hu Young , Gorte, Raymond J. , Vohs, John M. , Kim, Guntae

Article Issue Date2020-05 View2

Synthesis of carbon nanotube-nickel nanocomposites using atomic layer deposition for high-performance non-enzymatic glucose sensing File

Choi, Taejin , Kim, Soo Hyeon , Lee, Chang Wan , Kim, Hangil , Choi, Sang-Kyung , Kim, Soo-Hyun , Kim, Eunkyoung , Park, Jusang , Kim, Hyungjun

Article Issue Date2015-01 View4

Synthesis of two-dimensional MoS2/graphene heterostructure by atomic layer deposition using MoF6 precursor File

Kim, Youngjun , Choi, Daeguen , Woo, Whang Je , Lee, Jae Bok , Ryu, Gyeong Hee , Lim, Jun Hyung , Lee, Sunhee , Lee, Zonghoon , Im, Seongil , Ahn, Jong-Hyun , et al

Article Issue Date2019-11 View3

Tellurium 기반 휘발성 문턱 스위칭 및 고집적 메모리용 선택소자 응용 연구 File File

김승환 , 김창환 , 허남욱 , Suh, Joonki

Article Issue Date2023-11 View9

The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect File

Mun, Ki-Yeung , Hong, Tae Eun , Cheon, Taehoon , Jang, Yujin , Lim, Byoung-Yong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2014-07 View4

The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique File

Kim, Doyoung , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2015-01 View3

Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery File

Nandi, Dip K. , Yeo, Seungmin , Ansari, Mohd Zahid , Sinha, Soumyadeep , Cheon, Taehoon , Kwon, Jiseok , Kim, Hyungjun , Heo, Jaeyeong , Song, Taeseup , Kim, Soo-Hyun

Article Issue Date2019-11 View1

Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition File

Jang, Yujin , Yeo, Seungmin , Lee, Han-Bo-Ram , Kim, Hyungjun , Kim, Soo-Hyun

Article Issue Date2016-03 View4

ZnO homojunction core-shell nanorods ultraviolet photo-detecting diodes prepared by atomic layer deposition File

Ko, Kyung Yong , Kang, Hyemin , Park, Jusang , Min, Byung-Wook , Lee, Hee Sung , Im, Seongil , Kang, Ji Yeon , Myoung, Jae-Min , Jung, Jae-Hun , Kim, Soo-Hyun , et al

Article Issue Date2014-04 View1

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