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Suh, Joonki
Semiconductor Nanotechnology Lab.
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Tellurium 기반 휘발성 문턱 스위칭 및 고집적 메모리용 선택소자 응용 연구

Alternative Title
Advanced Tellurium-Based Threshold Switching Devices for High-Density Memory Arrays
Author(s)
김승환김창환허남욱Suh, Joonki
Issued Date
2023-11
DOI
10.4313/JKEM.2023.36.6.2
URI
https://scholarworks.unist.ac.kr/handle/201301/66074
Citation
전기전자재료학회논문지, v.36, no.6, pp.547 - 555
Abstract
High-density crossbar arrays based on storage class memory (SCM) are ideally suited to handle an exponential increase in data storage and processing as a central hardware unit in the era of AI-based technologies. To achieve this, selector devices are required to be co-integrated with SCM to address the sneak-path current issue that indispensably arises in such crossbar-type architecture. In this perspective, we first summarize the current state of tellurium-based threshold-switching devices and recent advances in the material, processing, and device aspects. We thoroughly review the physicochemical properties of elemental tellurium (Te) and representative binary tellurides, their tailored deposition techniques, and operating mechanisms when implemented in two-terminal threshold switching devices. Lastly, we discuss the promising research direction of Te-based selectors and possible issues that need to be considered in advance.
Publisher
한국전기전자재료학회
ISSN
1226-7945
Keyword (Author)
SelectorTelluriumStorage class memoryOvonic threshold switchSneak current pathSputteringAtomic layer deposition

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