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Atomistic insights on hydrogen plasma treatment for stabilizing High-k/Si interface File File

Kim, Byungjo , Kim, Muyoung , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2022-08 View143
Atomistic kinetic Monte Carlo simulation on atomic layer deposition of TiN thin film File

Kim, Sangtae , An, Hyungmin , Oh, Sangmin , Jung, Jisu , Kim, Byungjo , Nam, Sang Ki , Han, Seungwu

Article Issue Date2022-10 View214
Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing

Kim, Byungjo , Hong, Seokjun , Jeong, Hyunhak , Yoo, Suyoung , Cho, Seongkeun , Nam, Sang Ki , Kim, Yihwan

Conference Paper Issue Date2023-10-12 View96
Combined molecular dynamics simulations and reaction kinetics study on wettability of trimethylsilyl functionalized silicon surfaces File

Jeong, Hyunhak , Kim, Byungjo , Park, Taeuk , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2022-12 View116
Computational approach for plasma process optimization combined with deep learning model File

Ko, Jungmin , Bae, Jinkyu , Park, Minho , Jo, Younghyun , Lee, Hyunjae , Kim, Kyunghyun , Yoo, Suyoung , Nam, Sang Ki , Sung, Dougyong , Kim, Byungjo

Article Issue Date2023-08 View131
Deep learning model for ion sputtering dynamics with molecular dynamics simulation

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Yoo, Suyoung , Nam, Sang Ki

Conference Paper Issue Date2022-10-05 View76
Deep neural network-based reduced-order modeling of ion-surface interactions combined with molecular dynamics simulation File

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Hahn, Seung Ho , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2023-09 View149
Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

Jeong, Hyunhak , Kim, Byungjo , Kim, Youjung , Choi, Hanmei , Yoo, Suyoung , Nam, Sang Ki

Conference Paper Issue Date2023-09-27 View131
Multiscale simulation on plasma-surface interaction: industrial plasma processing

Kim, Byungjo , Yoo, Suyoung , Jeong, Hyunhak , Park, Taeuk , Nam, Sang Ki

Conference Paper Issue Date2022-07-07 View71
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