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- Kim, Byungjo
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Multiscale simulation on plasma-surface interaction: industrial plasma processing
- Author(s)
- Kim, Byungjo, Yoo, Suyoung, Jeong, Hyunhak, Park, Taeuk, Nam, Sang Ki
- Issued Date
- 2022-07-07
- Citation
- 22nd IEEE International Conference on Nanotechnology
- Publisher
- IEEE
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