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- Kim, Byungjo
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Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential
- Author(s)
- Jeong, Hyunhak, Kim, Byungjo, Kim, Youjung, Choi, Hanmei, Yoo, Suyoung, Nam, Sang Ki
- Issued Date
- 2023-09-27
- Citation
- International Conference on Simulation of Semiconductor Processes and Devices
- Publisher
- IEEE
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