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- Kim, Byungjo
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Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing
- Author(s)
- Kim, Byungjo, Hong, Seokjun, Jeong, Hyunhak, Yoo, Suyoung, Cho, Seongkeun, Nam, Sang Ki, Kim, Yihwan
- Issued Date
- 2023-10-12
- Citation
- 76th Annual Gaseous Electronics Conference
- Publisher
- American Physical Society
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