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Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing

Kim, Byungjo , Hong, Seokjun , Jeong, Hyunhak , Yoo, Suyoung , Cho, Seongkeun , Nam, Sang Ki , Kim, Yihwan

Conference Paper Issue Date2023-10-12 View36
Combined molecular dynamics simulations and reaction kinetics study on wettability of trimethylsilyl functionalized silicon surfaces File

Jeong, Hyunhak , Kim, Byungjo , Park, Taeuk , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2022-12 View37
Deep learning model for ion sputtering dynamics with molecular dynamics simulation

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Yoo, Suyoung , Nam, Sang Ki

Conference Paper Issue Date2022-10-05 View30
Deep neural network-based reduced-order modeling of ion-surface interactions combined with molecular dynamics simulation File

Kim, Byungjo , Bae, Jinkyu , Jeong, Hyunhak , Hahn, Seung Ho , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2023-09 View45
Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

Jeong, Hyunhak , Kim, Byungjo , Kim, Youjung , Choi, Hanmei , Yoo, Suyoung , Nam, Sang Ki

Conference Paper Issue Date2023-09-27 View87
Multiscale simulation on plasma-surface interaction: industrial plasma processing

Kim, Byungjo , Yoo, Suyoung , Jeong, Hyunhak , Park, Taeuk , Nam, Sang Ki

Conference Paper Issue Date2022-07-07 View26
Statistical Analysis of Electrical Properties of Octanemonothiol versus Octanedithol in PEDOT:PSS-Electrode Molecular Junctions File

Lee, Hanki , Jeong, Hyunhak , Kim, Dongu , Hwang, Wang-Taek , Tchoe, Youngbin , Yi, Gyu-Chul , Lee, Takhee

Article Issue Date2015-08 View40
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