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Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects File

Cheon, Taehoon , Choi, Sang-Hyeok , Kim, Soo-Hyun , Kang, Dae-Hwan

Article Issue Date2011-03 View4
Atomic-layer-deposited WNxCy thin films as diffusion barrier for copper metallization File

Kim, Soo-Hyun , Oh, Su Suk , Kim, Ki Bum , Kang, Dae-Hwan , Li, Wei-Min , Haukka, Suvi , Tuominen, Marko

Article Issue Date2003-06 View8
Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu File

Eom, Tae-Kwang , Kim, Soo-Hyun , Kang, Dae-Hwan , Kim, Hoon

Article Issue Date2011-11 View3
Emulation of spike-timing dependent plasticity in nano-scale phase change memory File

Kang, Dae-Hwan , Jun, Hyun-Goo , Ryoo, Kyung-Chang , Jeong, Hongsik , Sohn, Hyunchul

Article Issue Date2015-05 View9
Modeling of data retention statistics of phase-change memory with confined- and mushroom-type cells File

Kwon, Yongwoo , Park, Byoungnam , Yang, Heesun , Hwang, Jin-Ha , Kang, Dae-Hwan , Jeong, Hongsik , Song, Yunheub

Article Issue Date2016-08 View8
Plasma-Enhanced Atomic Layer Deposition of TaCx Films Using Tris(neopentyl) Tantalum Dichloride and H-2 Plasma File

Kim, Tae-Ho , Eom, Tae-Kwang , Kim, Soo-Hyun , Kang, Dae-Hwan , Kim, Hoon , Yu, Sangho , Lim, Jin Mook

Article Issue Date2011-05 View4
Resistive switching characteristics of maghemite nanoparticle assembly File

Hu, Quanli , Jung, Sung Mok , Lee, Hyun Ho , Kim, Yong-Sang , Choi, Young Jin , Kang, Dae-Hwan , Kim, Ki-Bum , Yoon, Tae-Sik

Article Issue Date2011-03 View5
Ring contact electrode process for high density phase change random access memory File

Ryoo, Kyung-Chang , Song, Yoon Jong , Shin, Jae-Min , Park, Sang-Su , Lim, Dong-Won , Kim, Jae-Hyun , Park, Woon-Ik , Sim, Ku-Ri , Jeong, Ji-Hyun , Kang, Dae-Hwan , et al

Article Issue Date2007-04 View5
Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating File

Choi, Sang-Hyeok , Cheon, Taehoon , Kim, Soo-Hyun , Kang, Dae-Hwan , Park, Gye-Soon , Kim, Sunjung

Article Issue Date2011-03 View3
Understanding on the current-induced crystallization process and faster set write operation thereof in non-volatile phase change memory File

Kang, Dae-Hwan , Kim, Nan Young , Jeong, Hongsik , Cheong, Byung-ki

Article Issue Date2012-02 View4
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