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Jeong, Hongsik
Future Semiconductor Technology Lab.
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Understanding on the current-induced crystallization process and faster set write operation thereof in non-volatile phase change memory

Author(s)
Kang, Dae-HwanKim, Nan YoungJeong, HongsikCheong, Byung-ki
Issued Date
2012-02
DOI
10.1063/1.3684245
URI
https://scholarworks.unist.ac.kr/handle/201301/27140
Fulltext
https://aip.scitation.org/doi/10.1063/1.3684245
Citation
APPLIED PHYSICS LETTERS, v.100, no.6, pp.063508
Abstract
We experimentally demonstrate that the crystallization process of Ge-Sb-Te crystallites during the set operation in non-volatile phase change memory commences after threshold switching event. It is also shown that the nucleation and growth rates have opposite behaviors with the increase of set operation power: the incubation time in nucleation stage can be minimized at higher power, whereas the percolation time in growth stage is smaller at lower power. Based on these results, we introduce a two-step set pulse of high-power nucleation and low-power growth making the set write operation much faster than conventional simple rectangular or slow-quenched form.
Publisher
AMER INST PHYSICS
ISSN
0003-6951

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