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Shin, Heungjoo
Micro/Nano Integrated Systems (MNIS) Lab
Research Interests
  • Carbon-MEMS
  • Nanofabrication
  • Gas sensors
  • Biosensors
  • Electrochemical sensors
  • SPM

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Highly sensitive hydrogen gas sensor based on a suspended palladium/carbon nanowire fabricated via batch microfabrication processes

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Title
Highly sensitive hydrogen gas sensor based on a suspended palladium/carbon nanowire fabricated via batch microfabrication processes
Author
Lim, YeongjinLee, YunjeongHeo, Jeong-IlShin, Heungjoo
Issue Date
2015-04
Publisher
ELSEVIER SCIENCE SA
Citation
SENSORS AND ACTUATORS B-CHEMICAL, v.210, pp.218 - 224
Abstract
We present a highly sensitive H2 sensor based on a single Pd-functionalized carbon nanowire suspended ∼10 μm above a substrate while monolithically bridging two carbon posts. The carbon nanowire and posts were fabricated using a batch carbon-microelectromechanical system (MEMS) process consisting of photolithography and pyrolysis. The pyrolysis process resulted in a significant volume reduction in which the nanowire diameter was reduced to ∼120 nm from the original 1 μm × 1.5 μm photoresist wire. Because of SiO2 eaves formed by isotropic etching of the Si substrate, as well as the suspended geometry of the carbon nanowire, a single palladium evaporation process enabled selective palladium coating on the carbon nanowire without any nano-patterning processes. The electrical conductivity of the carbon nanowire was modulated by varying the pyrolysis temperature so that the electrical resistance along the suspended Pd/C nanowire was affected predominantly by hydrogen chemisorption onto the thin Pd layer enclosing the carbon core. The suspended functionalized wire showed better sensing capability compared to a Pd nanowire fabricated on the substrate with similar dimensions, because of enhanced mass transport. The suspended nanowire-based H2 sensor quantified from 10 to 500 ppm H2 with percentile resistance changes of 5.9 to 129%.
URI
https://scholarworks.unist.ac.kr/handle/201301/9926
URL
https://www.sciencedirect.com/science/article/pii/S0925400514016554?via%3Dihub
DOI
10.1016/j.snb.2014.12.109
ISSN
0925-4005
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