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DC Field | Value | Language |
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dc.citation.endPage | 224 | - |
dc.citation.startPage | 218 | - |
dc.citation.title | SENSORS AND ACTUATORS B-CHEMICAL | - |
dc.citation.volume | 210 | - |
dc.contributor.author | Lim, Yeongjin | - |
dc.contributor.author | Lee, Yunjeong | - |
dc.contributor.author | Heo, Jeong-Il | - |
dc.contributor.author | Shin, Heungjoo | - |
dc.date.accessioned | 2023-12-22T01:36:32Z | - |
dc.date.available | 2023-12-22T01:36:32Z | - |
dc.date.created | 2015-01-07 | - |
dc.date.issued | 2015-04 | - |
dc.description.abstract | We present a highly sensitive H2 sensor based on a single Pd-functionalized carbon nanowire suspended ∼10 μm above a substrate while monolithically bridging two carbon posts. The carbon nanowire and posts were fabricated using a batch carbon-microelectromechanical system (MEMS) process consisting of photolithography and pyrolysis. The pyrolysis process resulted in a significant volume reduction in which the nanowire diameter was reduced to ∼120 nm from the original 1 μm × 1.5 μm photoresist wire. Because of SiO2 eaves formed by isotropic etching of the Si substrate, as well as the suspended geometry of the carbon nanowire, a single palladium evaporation process enabled selective palladium coating on the carbon nanowire without any nano-patterning processes. The electrical conductivity of the carbon nanowire was modulated by varying the pyrolysis temperature so that the electrical resistance along the suspended Pd/C nanowire was affected predominantly by hydrogen chemisorption onto the thin Pd layer enclosing the carbon core. The suspended functionalized wire showed better sensing capability compared to a Pd nanowire fabricated on the substrate with similar dimensions, because of enhanced mass transport. The suspended nanowire-based H2 sensor quantified from 10 to 500 ppm H2 with percentile resistance changes of 5.9 to 129%. | - |
dc.identifier.bibliographicCitation | SENSORS AND ACTUATORS B-CHEMICAL, v.210, pp.218 - 224 | - |
dc.identifier.doi | 10.1016/j.snb.2014.12.109 | - |
dc.identifier.issn | 0925-4005 | - |
dc.identifier.scopusid | 2-s2.0-84921391931 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/9926 | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0925400514016554?via%3Dihub | - |
dc.identifier.wosid | 000350000000029 | - |
dc.language | 영어 | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Highly sensitive hydrogen gas sensor based on a suspended palladium/carbon nanowire fabricated via batch microfabrication processes | - |
dc.type | Article | - |
dc.description.isOpenAccess | FALSE | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Analytical; Electrochemistry; Instruments & Instrumentation | - |
dc.relation.journalResearchArea | Chemistry; Electrochemistry; Instruments & Instrumentation | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordAuthor | Hydrogen gas sensor | - |
dc.subject.keywordAuthor | Suspended nanowire | - |
dc.subject.keywordAuthor | Palladium | - |
dc.subject.keywordAuthor | Selective functionalization | - |
dc.subject.keywordAuthor | Carbon-MEMS | - |
dc.subject.keywordPlus | CARBON STRUCTURES | - |
dc.subject.keywordPlus | SYSTEMS | - |
dc.subject.keywordPlus | NANOSTRUCTURES | - |
dc.subject.keywordPlus | NANOTUBES | - |
dc.subject.keywordPlus | PLATFORM | - |
dc.subject.keywordPlus | ARRAYS | - |
dc.subject.keywordPlus | NO2 | - |
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