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- Jang, Ji-Hyun
- Structures & Sustainable Energy Lab.
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Photobleaching photoacid generator
- Author(s)
- Kim, J.-B., Jang, Ji-Hyun, Kim, H.-W., Woo, S.-G.
- Issued Date
- 2001
- Citation
- JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.14, no.3, pp.341 - 344
- Abstract
- A cyclopropyl group was introduced into the photoacid generator in order to give the photobleaching property at 193 nm. Cyclopropyldiphenylsulfonium trifluoromethanesulfonate (CpDP-Tf) was synthesized for this photobleaching effect. This compound is stable up to 165°C. The absorbance of CpDP-Tf at 193 nm decreases upon exposure. The resist containing CpDP-Tf gave the higher resolution comparing with that containing triphenyl-sulfonium trifluoromethanesulfonate.
- Publisher
- TECHNICAL ASSOC PHOTOPOLYMERS
- ISSN
- 0914-9244
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