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장지현

Jang, Ji-Hyun
Structures & Sustainable Energy Lab.
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dc.citation.endPage 344 -
dc.citation.number 3 -
dc.citation.startPage 341 -
dc.citation.title JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY -
dc.citation.volume 14 -
dc.contributor.author Kim, J.-B. -
dc.contributor.author Jang, Ji-Hyun -
dc.contributor.author Kim, H.-W. -
dc.contributor.author Woo, S.-G. -
dc.date.accessioned 2023-12-22T12:06:18Z -
dc.date.available 2023-12-22T12:06:18Z -
dc.date.created 2014-11-18 -
dc.date.issued 2001 -
dc.description.abstract A cyclopropyl group was introduced into the photoacid generator in order to give the photobleaching property at 193 nm. Cyclopropyldiphenylsulfonium trifluoromethanesulfonate (CpDP-Tf) was synthesized for this photobleaching effect. This compound is stable up to 165°C. The absorbance of CpDP-Tf at 193 nm decreases upon exposure. The resist containing CpDP-Tf gave the higher resolution comparing with that containing triphenyl-sulfonium trifluoromethanesulfonate. -
dc.identifier.bibliographicCitation JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.14, no.3, pp.341 - 344 -
dc.identifier.issn 0914-9244 -
dc.identifier.scopusid 2-s2.0-0035747315 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/9115 -
dc.language 영어 -
dc.publisher TECHNICAL ASSOC PHOTOPOLYMERS -
dc.title Photobleaching photoacid generator -
dc.type Article -
dc.description.journalRegisteredClass scopus -

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