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- Shin, Tae Joo
- Synchrotron Radiation Research Lab.
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Exploration of residual strain in HfO2 thin films using the 2D-GIXD synchrotron technique
- Author(s)
- Lee, Seunghun, Shin, Tae Joo
- Issued Date
- 2025-06-04
- Citation
- 2025 IEEE International Interconnect Technology Conference (IITC)
- Publisher
- The Institute of Electrical and Electronics Engineers
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