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- Shin, Tae Joo
- Synchrotron Radiation Research Lab.
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Extreme Ultra-violet Metal Oxide Resist Synthesis as Hard Mask for Nano Structure Fabrication
- Author(s)
- Ju, Janghyun, Yoon, Yongje, Ok, Eun Jeong, Park, Inyeong, Shin, Tae Joo
- Issued Date
- 2025-09-17
- Citation
- E-MRS 2025 Fall Meeting
- Publisher
- The European Materials Research Society (E-MRS)
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