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Shin, Tae Joo
Synchrotron Radiation Research Lab.
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DC Field Value Language
dc.citation.conferencePlace PL -
dc.citation.conferencePlace Poland -
dc.citation.title E-MRS 2025 Fall Meeting -
dc.contributor.author Ju, Janghyun -
dc.contributor.author Yoon, Yongje -
dc.contributor.author Ok, Eun Jeong -
dc.contributor.author Park, Inyeong -
dc.contributor.author Shin, Tae Joo -
dc.date.accessioned 2026-01-07T14:26:23Z -
dc.date.available 2026-01-07T14:26:23Z -
dc.date.created 2026-01-07 -
dc.date.issued 2025-09-17 -
dc.identifier.bibliographicCitation E-MRS 2025 Fall Meeting -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/89959 -
dc.language 영어 -
dc.publisher The European Materials Research Society (E-MRS) -
dc.title Extreme Ultra-violet Metal Oxide Resist Synthesis as Hard Mask for Nano Structure Fabrication -
dc.type Conference Paper -
dc.date.conferenceDate 2025-09-15 -

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