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- Shin, Tae Joo
- Synchrotron Radiation Research Lab.
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Development of the synchrotron-based EUV interference lithography technique at the PLS-II 8A2 AP-XPS endstation
- Author(s)
- Yoon, Yongje, Kim, Jung Jin, Shin, Tae Joo
- Issued Date
- 2025-11-20
- Citation
- The 37th Synchrotron Radiation User's Workshop
- Publisher
- The Korean Synchrotron Radiation User's Association
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