| dc.citation.conferencePlace |
KO |
- |
| dc.citation.conferencePlace |
포항 |
- |
| dc.citation.title |
The 37th Synchrotron Radiation User's Workshop |
- |
| dc.contributor.author |
Yoon, Yongje |
- |
| dc.contributor.author |
Kim, Jung Jin |
- |
| dc.contributor.author |
Shin, Tae Joo |
- |
| dc.date.accessioned |
2026-01-07T14:25:56Z |
- |
| dc.date.available |
2026-01-07T14:25:56Z |
- |
| dc.date.created |
2026-01-07 |
- |
| dc.date.issued |
2025-11-20 |
- |
| dc.identifier.bibliographicCitation |
The 37th Synchrotron Radiation User's Workshop |
- |
| dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/89927 |
- |
| dc.language |
한국어 |
- |
| dc.publisher |
The Korean Synchrotron Radiation User's Association |
- |
| dc.title |
Development of the synchrotron-based EUV interference lithography technique at the PLS-II 8A2 AP-XPS endstation |
- |
| dc.type |
Conference Paper |
- |
| dc.date.conferenceDate |
2025-11-19 |
- |