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- Kim, Soo-Hyun
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 제4회 2025 한국표면분석학회 종합학술대회 | - |
| dc.contributor.author | Seo, Dongbeom | - |
| dc.contributor.author | Kim, Sang Bok | - |
| dc.contributor.author | Kim, Soo-Hyun | - |
| dc.date.accessioned | 2025-12-29T17:33:22Z | - |
| dc.date.available | 2025-12-29T17:33:22Z | - |
| dc.date.created | 2025-12-26 | - |
| dc.date.issued | 2025-11-06 | - |
| dc.identifier.bibliographicCitation | 제4회 2025 한국표면분석학회 종합학술대회 | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/89442 | - |
| dc.publisher | 한국표면분석학회 | - |
| dc.title | Highly Conductive ALD-WCₓ Ultrathin Diffusion Barriers for Cu and Ru Interconnects | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2025-11-05 | - |
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