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- Hur, Min Sup
- Computational Plasma Lab.
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Particle-in-cell simulation of a neutral beam source for materials processing
- Author(s)
- Hur, Min Sup, Kim, SJ, Lee, HS, Lee, JK, Yeom, GY
- Issued Date
- 2002-02
- Citation
- IEEE TRANSACTIONS ON PLASMA SCIENCE, v.30, no.1, pp.110 - 111
- Abstract
- Neutral beam processing is being considered as a new technique to reduce plasma-induced damage in materials processing. We report on particle-in-cell simulations of a neutral beam source. The system is composed of an ion-beam source and multireflectors which neutralize incident ions and reflect neutral particles. It is revealed from the simulations that about 2.8 % of the ion-current from an ion-beam source is successfully neutralized before reaching a diagnostic plate.
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- ISSN
- 0093-3813
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