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Hur, Min Sup
Computational Plasma Lab
Research Interests
  • Laser-Plasma Electron Accelerator and Table-top Femto Hard X-ray generation
  • Plasma-based THz generation
  • PIC and fluid code development
  • Reduced Laser-Plasma modelling
  • Capillary Discharge Systems for Guidied Laser Wakefield Accelerators

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Particle-in-cell simulation of a neutral beam source for materials processing

Cited 6 times inthomson ciCited 10 times inthomson ci
Title
Particle-in-cell simulation of a neutral beam source for materials processing
Author
Hur, Min SupKim, SJLee, HSLee, JKYeom, GY
Keywords
Neutral beam source; Particle-in-cell simulation; Plasma materials processing
Issue Date
2002-02
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, v.30, no.1, pp.110 - 111
Abstract
Neutral beam processing is being considered as a new technique to reduce plasma-induced damage in materials processing. We report on particle-in-cell simulations of a neutral beam source. The system is composed of an ion-beam source and multireflectors which neutralize incident ions and reflect neutral particles. It is revealed from the simulations that about 2.8 % of the ion-current from an ion-beam source is successfully neutralized before reaching a diagnostic plate.
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DOI
10.1109/TPS.2002.1003948
ISSN
0093-3813
Appears in Collections:
PHY_Journal Papers
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