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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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고온공정을 포함한 MEMS 제작공정에 적합한 실리콘 관통 전극 및 이의 제조방법
- Application Date
- 2022-06-08
- Registration Date
- 2024-10-02
- Application No.
- 10-2022-0069665
- Publication No.
- 10-2715093
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