File Download
There are no files associated with this item.
SFX Link
- Find it @ UNIST can give you direct access to the published full text of this article. (UNISTARs only)
- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
Views & Downloads
Detailed Information
Cited time in 
Cited time in 
Cited time in
Metadata Downloads
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.assignee | 울산과학기술원 | - |
| dc.contributor.author | 신흥주 | - |
| dc.contributor.author | 곽종현 | - |
| dc.contributor.author | 김범상 | - |
| dc.date.accessioned | 2024-11-19T16:35:35Z | - |
| dc.date.application | 2022-06-08 | - |
| dc.date.available | 2024-11-19T16:35:35Z | - |
| dc.date.registration | 2024-10-02 | - |
| dc.identifier.patentApplicationNumber | 10-2022-0069665 | - |
| dc.identifier.patentRegistrationNumber | 10-2715093 | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/84504 | - |
| dc.title | 고온공정을 포함한 MEMS 제작공정에 적합한 실리콘 관통 전극 및 이의 제조방법 | - |
| dc.type | Patent | - |
| dc.publisher.country | KO | - |
| dc.type.iprs | 특허 | - |
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.