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- Kim, Byungjo
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Atomistic-scale Simulations on Surface Activation Process of Dielectric Oxides for Hybrid Bonding Applications
- Author(s)
- Hahn, Seung Ho, Lee, Hyunjae, Jo, Young Hyun, Kim, Byungjo, Kim, Wooyoung, Choi, Wonyoung, Lim, Kyeongbin, Rhee, Minwoo
- Issued Date
- 2021-12-01
- Citation
- The 23rd IEEE Electronics Packaging Technology Conference
- Publisher
- IEEE
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