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- Kim, Byungjo
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | JA | - |
| dc.citation.title | International Conference on Simulation of Semiconductor Processes and Devices | - |
| dc.contributor.author | Jeong, Hyunhak | - |
| dc.contributor.author | Kim, Byungjo | - |
| dc.contributor.author | Kim, Youjung | - |
| dc.contributor.author | Choi, Hanmei | - |
| dc.contributor.author | Yoo, Suyoung | - |
| dc.contributor.author | Nam, Sang Ki | - |
| dc.date.accessioned | 2024-02-05T14:35:09Z | - |
| dc.date.available | 2024-02-05T14:35:09Z | - |
| dc.date.created | 2024-02-05 | - |
| dc.date.issued | 2023-09-27 | - |
| dc.identifier.bibliographicCitation | International Conference on Simulation of Semiconductor Processes and Devices | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/81304 | - |
| dc.publisher | IEEE | - |
| dc.title | Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2023-09-27 | - |
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