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- Kim, Byungjo
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | US | - |
| dc.citation.title | 76th Annual Gaseous Electronics Conference | - |
| dc.contributor.author | Kim, Byungjo | - |
| dc.contributor.author | Hong, Seokjun | - |
| dc.contributor.author | Jeong, Hyunhak | - |
| dc.contributor.author | Yoo, Suyoung | - |
| dc.contributor.author | Cho, Seongkeun | - |
| dc.contributor.author | Nam, Sang Ki | - |
| dc.contributor.author | Kim, Yihwan | - |
| dc.date.accessioned | 2024-02-05T14:05:09Z | - |
| dc.date.available | 2024-02-05T14:05:09Z | - |
| dc.date.created | 2024-02-05 | - |
| dc.date.issued | 2023-10-12 | - |
| dc.identifier.bibliographicCitation | 76th Annual Gaseous Electronics Conference | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/81303 | - |
| dc.publisher | American Physical Society | - |
| dc.title | Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2023-10-09 | - |
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