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- Jang, Ji-Hyun
- Structures & Sustainable Energy Lab.
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Environmentally Friendly Negative Resists Based on Acid-Catalyzed Acetalization for 193-nm Lithography
- Author(s)
- Kim, JB, Jang, Ji-Hyun, Ko, JS, Choi, JH, Lee, K.-K.
- Issued Date
- 2003-10
- Citation
- MACROMOLECULAR RAPID COMMUNICATIONS, v.24, no.15, pp.879 - 882
- Abstract
- Novel water-developable negative resists were designed to induce both crosslinking and polarity change upon exposure and bake. The matrix polymers were synthesized by copolymerization of glyceryl methacrylate and methacrolein. The acid-catalyzed acetalization of the polymer induced crosslinking , polarity change, and an increase in dry-etch resistance. The resist formulated with this polymer and cast in a water/ethanol mixture showed 0.7 mum line and space patterns using a mercury-xenon lamp in a contact printing mode and pure water as a developer.
- Publisher
- WILEY-V C H VERLAG GMBH
- ISSN
- 1022-1336
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