Thermal conductivity detector (TCD)-type gas sensor based on the suspended 1D nanoheater for IoT applications

Abstract

We developed a thermal conductivity detector-type gas sensor based on a suspended 1D nanoheater. The excellent thermal insulation and small size induced by the suspended nano-sized 1D architecture enabled ultrafast gas detection at ultralow power with pulsed power input. Due to these advantageous, thus, the nanoheater-based gas sensor is expected to be applicable to IoT applications. The nanoheater-based sensor chip was integrated with throughsilicon vias adaptive to the heater fabrication for facile sensor packaging. Moreover, entire sensor chips were fabricated using wafer-level microfabrication processes, ensuring cost-effective manufacturing.