dc.citation.conferencePlace |
GE |
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dc.citation.conferencePlace |
Munich |
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dc.citation.title |
The 36th International Conference on Micro Electro Mechanical Systems |
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dc.contributor.author |
Cho, Wootaek |
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dc.contributor.author |
Kwak, Jong-Hyun |
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dc.contributor.author |
Kim, Taejung |
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dc.contributor.author |
Shin, Heungjoo |
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dc.date.accessioned |
2024-01-02T15:35:14Z |
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dc.date.available |
2024-01-02T15:35:14Z |
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dc.date.created |
2024-01-02 |
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dc.date.issued |
2023-01-16 |
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dc.description.abstract |
We developed a thermal conductivity detector-type gas sensor based on a suspended 1D nanoheater. The excellent thermal insulation and small size induced by the suspended nano-sized 1D architecture enabled ultrafast gas detection at ultralow power with pulsed power input. Due to these advantageous, thus, the nanoheater-based gas sensor is expected to be applicable to IoT applications. The nanoheater-based sensor chip was integrated with throughsilicon vias adaptive to the heater fabrication for facile sensor packaging. Moreover, entire sensor chips were fabricated using wafer-level microfabrication processes, ensuring cost-effective manufacturing. |
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dc.identifier.bibliographicCitation |
The 36th International Conference on Micro Electro Mechanical Systems |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/67515 |
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dc.language |
영어 |
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dc.publisher |
IEEE |
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dc.title |
Thermal conductivity detector (TCD)-type gas sensor based on the suspended 1D nanoheater for IoT applications |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2023-01-15 |
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