File Download
There are no files associated with this item.
SFX Link
- Find it @ UNIST can give you direct access to the published full text of this article. (UNISTARs only)
- Ruoff, Rodney S.
Views & Downloads
Detailed Information
Cited time in 
Cited time in 
Cited time in
Metadata Downloads
Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning
- Issued Date
- 2007-01
- Citation
- SMALL, v.3, no.1, pp.132 - 138
- Abstract
- We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.
- Publisher
- WILEY-V C H VERLAG GMBH
- ISSN
- 1613-6810
- Keyword (Author)
- lithography, microfabrication, patterning, reactive ion etching
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.