Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites
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- Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites
- Ophus, C.; Fitzpatrick, N. Nelson; Lee, Zonghoon; Luber, E.; Harrower, C.; Westra, K.; Dahmen, U.; Radmilovic, V.; Evoy, S.; Mitlin, D.
- TEMPERATURE; CANTILEVERS; GLASSES; ALUMINA
- Issue Date
- AMER INST PHYSICS
- APPLIED PHYSICS LETTERS, v.92, no.12, pp.1 - 3
- This study details the resonance properties of 20 nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al-32 at. %Mo nanocomposite. The advantage of the Al-32 at. %Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8 μm long, 20 nm thick Al-32 at. %Mo device has a spring constant of K280 μNm. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure.
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