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DC Field | Value | Language |
---|---|---|
dc.citation.endPage | 3 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 1 | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 92 | - |
dc.contributor.author | Ophus, C. | - |
dc.contributor.author | Fitzpatrick, N. Nelson | - |
dc.contributor.author | Lee, Zonghoon | - |
dc.contributor.author | Luber, E. | - |
dc.contributor.author | Harrower, C. | - |
dc.contributor.author | Westra, K. | - |
dc.contributor.author | Dahmen, U. | - |
dc.contributor.author | Radmilovic, V. | - |
dc.contributor.author | Evoy, S. | - |
dc.contributor.author | Mitlin, D. | - |
dc.date.accessioned | 2023-12-22T08:43:52Z | - |
dc.date.available | 2023-12-22T08:43:52Z | - |
dc.date.created | 2014-06-24 | - |
dc.date.issued | 2008-03 | - |
dc.description.abstract | This study details the resonance properties of 20 nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al-32 at. %Mo nanocomposite. The advantage of the Al-32 at. %Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8 μm long, 20 nm thick Al-32 at. %Mo device has a spring constant of K280 μNm. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure. | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.92, no.12, pp.1 - 3 | - |
dc.identifier.doi | 10.1063/1.2841849 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.scopusid | 2-s2.0-41349120027 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/5026 | - |
dc.identifier.url | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=41349120027 | - |
dc.identifier.wosid | 000254510300079 | - |
dc.language | 영어 | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites | - |
dc.type | Article | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | CANTILEVERS | - |
dc.subject.keywordPlus | GLASSES | - |
dc.subject.keywordPlus | ALUMINA | - |
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