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Lee, Zonghoon
Atomic-Scale Electron Microscopy Lab.
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dc.citation.endPage 3 -
dc.citation.number 12 -
dc.citation.startPage 1 -
dc.citation.title APPLIED PHYSICS LETTERS -
dc.citation.volume 92 -
dc.contributor.author Ophus, C. -
dc.contributor.author Fitzpatrick, N. Nelson -
dc.contributor.author Lee, Zonghoon -
dc.contributor.author Luber, E. -
dc.contributor.author Harrower, C. -
dc.contributor.author Westra, K. -
dc.contributor.author Dahmen, U. -
dc.contributor.author Radmilovic, V. -
dc.contributor.author Evoy, S. -
dc.contributor.author Mitlin, D. -
dc.date.accessioned 2023-12-22T08:43:52Z -
dc.date.available 2023-12-22T08:43:52Z -
dc.date.created 2014-06-24 -
dc.date.issued 2008-03 -
dc.description.abstract This study details the resonance properties of 20 nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al-32 at. %Mo nanocomposite. The advantage of the Al-32 at. %Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8 μm long, 20 nm thick Al-32 at. %Mo device has a spring constant of K280 μNm. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure. -
dc.identifier.bibliographicCitation APPLIED PHYSICS LETTERS, v.92, no.12, pp.1 - 3 -
dc.identifier.doi 10.1063/1.2841849 -
dc.identifier.issn 0003-6951 -
dc.identifier.scopusid 2-s2.0-41349120027 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/5026 -
dc.identifier.url http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=41349120027 -
dc.identifier.wosid 000254510300079 -
dc.language 영어 -
dc.publisher AMER INST PHYSICS -
dc.title Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites -
dc.type Article -
dc.description.journalRegisteredClass scopus -
dc.subject.keywordPlus TEMPERATURE -
dc.subject.keywordPlus CANTILEVERS -
dc.subject.keywordPlus GLASSES -
dc.subject.keywordPlus ALUMINA -

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