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Choi, EunMi
THz Vacuum Electronics and Electrodynamics
Research Interests
  • High power millimeter-wave/THz wave, vacuum electronics, plasma breakdown, electron beams, electromagnetics, microwave/RF engineering

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High-Density Plasma Diagnosis Using Quasi-Optical Millimeter-Wave Systems

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Title
High-Density Plasma Diagnosis Using Quasi-Optical Millimeter-Wave Systems
Author
Choe, Mun SeokSawant, AshwiniChoi, EunMi
Issue Date
2020-11
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, v.48, no.11, pp.3935 - 3941
Abstract
This report proposes a quasi-optical millimeter-wave system based on a noninvasive measurement technique to diagnose high-density plasmas. The millimeter wave in the F-band (90-140 GHz) can interact with high-density plasma (10(13)-10(14) cm(-3)) in the quasi-optical system, such that the plasma characteristics (e.g., plasma density and effective collision frequency) obtained using the Drude model can be measured with a high signal-to-noise ratio. High-density inductive radio frequency (RF) discharge argon plasma is generated in a helix of inductively coupled plasma using RF power of up to 1000 W at 13.56 MHz with a pressure of a few Torr. The millimeter-wave signals can be analyzed to estimate the plasma-density distribution by using the proposed axisymmetric 2-D multilayered plasma modeling. The experimental results agreed well with the model calculations. Qualitatively, the plasma density tends to increase with increasing RF power and gas pressure. The effective collision frequency decreases only with increasing gas pressure. The proposed measurement technique will also be applicable to measuring localized regions (with areas of a few square millimeters) of higher density plasma (10(14)-10(17) cm(-3)) by using terahertz waves for various applications.
URI
https://scholarworks.unist.ac.kr/handle/201301/49031
URL
https://ieeexplore.ieee.org/document/9211726
DOI
10.1109/TPS.2020.3026016
ISSN
0093-3813
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