There are no files associated with this item.
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.citation.endPage | 3941 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 3935 | - |
dc.citation.title | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
dc.citation.volume | 48 | - |
dc.contributor.author | Choe, Mun Seok | - |
dc.contributor.author | Sawant, Ashwini | - |
dc.contributor.author | Choi, EunMi | - |
dc.date.accessioned | 2023-12-21T16:42:31Z | - |
dc.date.available | 2023-12-21T16:42:31Z | - |
dc.date.created | 2020-12-09 | - |
dc.date.issued | 2020-11 | - |
dc.description.abstract | This report proposes a quasi-optical millimeter-wave system based on a noninvasive measurement technique to diagnose high-density plasmas. The millimeter wave in the F-band (90-140 GHz) can interact with high-density plasma (10(13)-10(14) cm(-3)) in the quasi-optical system, such that the plasma characteristics (e.g., plasma density and effective collision frequency) obtained using the Drude model can be measured with a high signal-to-noise ratio. High-density inductive radio frequency (RF) discharge argon plasma is generated in a helix of inductively coupled plasma using RF power of up to 1000 W at 13.56 MHz with a pressure of a few Torr. The millimeter-wave signals can be analyzed to estimate the plasma-density distribution by using the proposed axisymmetric 2-D multilayered plasma modeling. The experimental results agreed well with the model calculations. Qualitatively, the plasma density tends to increase with increasing RF power and gas pressure. The effective collision frequency decreases only with increasing gas pressure. The proposed measurement technique will also be applicable to measuring localized regions (with areas of a few square millimeters) of higher density plasma (10(14)-10(17) cm(-3)) by using terahertz waves for various applications. | - |
dc.identifier.bibliographicCitation | IEEE TRANSACTIONS ON PLASMA SCIENCE, v.48, no.11, pp.3935 - 3941 | - |
dc.identifier.doi | 10.1109/TPS.2020.3026016 | - |
dc.identifier.issn | 0093-3813 | - |
dc.identifier.scopusid | 2-s2.0-85096134848 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/49031 | - |
dc.identifier.url | https://ieeexplore.ieee.org/document/9211726 | - |
dc.identifier.wosid | 000589269300026 | - |
dc.language | 영어 | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | High-Density Plasma Diagnosis Using Quasi-Optical Millimeter-Wave Systems | - |
dc.type | Article | - |
dc.description.isOpenAccess | FALSE | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.relation.journalResearchArea | Physics | - |
dc.type.docType | Article | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordAuthor | Plasmas | - |
dc.subject.keywordAuthor | Plasma measurements | - |
dc.subject.keywordAuthor | Radio frequency | - |
dc.subject.keywordAuthor | Frequency measurement | - |
dc.subject.keywordAuthor | Density measurement | - |
dc.subject.keywordAuthor | Semiconductor device measurement | - |
dc.subject.keywordAuthor | Millimeter wave technology | - |
dc.subject.keywordAuthor | Inductively coupled plasma (ICP) | - |
dc.subject.keywordAuthor | millimeter waves | - |
dc.subject.keywordAuthor | plasma diagnostics | - |
dc.subject.keywordAuthor | quasi-optics | - |
dc.subject.keywordPlus | PERMITTIVITY | - |
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Tel : 052-217-1404 / Email : scholarworks@unist.ac.kr
Copyright (c) 2023 by UNIST LIBRARY. All rights reserved.
ScholarWorks@UNIST was established as an OAK Project for the National Library of Korea.