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- Kim, Kyung Rok
- Nano-Electronic Emerging Devices Lab.
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Si Single-Electron Transistors with Sidewall Depletion Gates and their Application to Dynamic Single-Electron Transistor Logic
- Author(s)
- Kim, Dae Hwan, Sung, Suk-Kang, Kim, Kyung Rok, Choi, Bum Ho, Hwang, Sung Woo, Ahn, Doyeol, Lee, Jong Duk, Park, Byung-Gook
- Issued Date
- 2001-12-02
- Citation
- IEEE International Electron Devices Meeting, pp.151 - 154
- Abstract
- Si single-electron transistors with sidewall depletion gates on a silicon-on-insulator nanowire are proposed and fabricated, using the combination of the conventional lithography and process technology. The size dependence of device characteristics shows good controllability and reproducibility, and a dynamic multi-functional SET logic is successfully demonstrated at 10 K, for the first time.
- Publisher
- IEEE Electron Device Society
- ISSN
- 0163-1918
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