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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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Carbon-MEMS for use as 3D micro/nano-fabrication technologies
- Alternative Title
- 3차원 마이크로/나노 공정 기법으로서의 Carbon-MEMS
- Author(s)
- 신흥주
- Issued Date
- 2016-12-14
- Citation
- 대한기계학회 2016년도 추계학술대회
- Publisher
- 대한기계학회
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