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신흥주

Shin, Heungjoo
Micro/Nano Integrated Systems Lab.
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DC Field Value Language
dc.citation.conferencePlace KO -
dc.citation.title 대한기계학회 2016년도 추계학술대회 -
dc.contributor.author 신흥주 -
dc.date.accessioned 2023-12-19T19:37:24Z -
dc.date.available 2023-12-19T19:37:24Z -
dc.date.created 2016-11-01 -
dc.date.issued 2016-12-14 -
dc.identifier.bibliographicCitation 대한기계학회 2016년도 추계학술대회 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/39848 -
dc.language 한국어 -
dc.publisher 대한기계학회 -
dc.title.alternative 3차원 마이크로/나노 공정 기법으로서의 Carbon-MEMS -
dc.title Carbon-MEMS for use as 3D micro/nano-fabrication technologies -
dc.type Conference Paper -
dc.date.conferenceDate 2016-12-14 -

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