File Download

There are no files associated with this item.

  • Find it @ UNIST can give you direct access to the published full text of this article. (UNISTARs only)
Related Researcher

신흥주

Shin, Heungjoo
Micro/Nano Integrated Systems Lab.
Read More

Views & Downloads

Detailed Information

Cited time in webofscience Cited time in scopus
Metadata Downloads

Suspended metal-oxide nanowire based gas sensors fabricated at a wafer level

Alternative Title
웨이퍼 단위 일괄공정으로 생산된 공중부유형 산화물 나노와이어 기반 가스센서
Author(s)
신흥주임영진권영민백정민
Issued Date
2018-04-12
URI
https://scholarworks.unist.ac.kr/handle/201301/37812
Citation
2018년도 한국세라믹학회 춘계학술대회
Abstract
Metal oxide nanowires have been widely utilized as a gas sensor material because of their large surface-to-volume ratios facilitating effective gas accessibility and fast response. The gas sensor performance can be enhanced by positioning nanostructures in the form of suspended architecture. We developed a simple batch process implementing suspended single carbon nanowire sensor platform using carbon-MEMS technology. Various metal oxide nanostructures such as ZnO nanowires and CuO nanoflakes could be selectively grown on the suspended sensor platform using successive batch processes. In this talk, we introduce the effect of the suspended architecture and circumferentially distributed nanostructures on the sensing performance. In addition, by adding a single insulation layer, the carbon nanowire could work as a heater enabling gas sensing with ultralow power consumption. At the meeting, we will report the preliminary gas sensing results collected from the nano-heater-integrated suspended metal-oxide nanowire based gas sensor.
Publisher
한국세라믹학회 춘계학술대회

qrcode

Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.