dc.citation.conferencePlace |
KO |
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dc.citation.title |
2018년도 한국세라믹학회 춘계학술대회 |
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dc.contributor.author |
신흥주 |
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dc.contributor.author |
임영진 |
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dc.contributor.author |
권영민 |
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dc.contributor.author |
백정민 |
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dc.date.accessioned |
2023-12-19T15:54:51Z |
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dc.date.available |
2023-12-19T15:54:51Z |
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dc.date.created |
2018-05-04 |
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dc.date.issued |
2018-04-12 |
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dc.description.abstract |
Metal oxide nanowires have been widely utilized as a gas sensor material because of their large surface-to-volume ratios facilitating effective gas accessibility and fast response. The gas sensor performance can be enhanced by positioning nanostructures in the form of suspended architecture. We developed a simple batch process implementing suspended single carbon nanowire sensor platform using carbon-MEMS technology. Various metal oxide nanostructures such as ZnO nanowires and CuO nanoflakes could be selectively grown on the suspended sensor platform using successive batch processes. In this talk, we introduce the effect of the suspended architecture and circumferentially distributed nanostructures on the sensing performance. In addition, by adding a single insulation layer, the carbon nanowire could work as a heater enabling gas sensing with ultralow power consumption. At the meeting, we will report the preliminary gas sensing results collected from the nano-heater-integrated suspended metal-oxide nanowire based gas sensor. |
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dc.identifier.bibliographicCitation |
2018년도 한국세라믹학회 춘계학술대회 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/37812 |
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dc.language |
영어 |
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dc.publisher |
한국세라믹학회 춘계학술대회 |
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dc.title.alternative |
웨이퍼 단위 일괄공정으로 생산된 공중부유형 산화물 나노와이어 기반 가스센서 |
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dc.title |
Suspended metal-oxide nanowire based gas sensors fabricated at a wafer level |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2018-04-11 |
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