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- Kwon, Min-Suk
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Theoretical investigation of CMOS-compatible metal-oxide-silicon-oxide-metal waveguides
- Author(s)
- Kwon, Min-Suk
- Issued Date
- 2011-06-13
- Citation
- Advanced Photonics - Integrated Photonics Research, Silicon and Nano-Photonics, pp.IMB4-1 - IMB4-3
- Abstract
- We propose a metal-oxide-silicon-oxide-metal (MOSOM) waveguide that is a hybrid plasmonic waveguide, and we discuss its fabrication process based on standard CMOS fabrication tools. The characteristics of the MOSOM waveguide mode are theoretically investigated.
- Publisher
- Optical Society of America
- ISBN
- 978-155752913-8
- ISSN
- 2162-2701
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