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- Kwon, Min-Suk
- Ubiquitous Photonics Lab.
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Experimental investigation of CMOS-compatible metal-insulator-silicon-insulator-metal waveguides
- Author(s)
- Kwon, Min-Suk, Shin, Jin-Soo, Shin, Sang-Yung
- Issued Date
- 2012-06-17
- Citation
- Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2012, pp.IW1B.3.1 - IW1B.3.3
- Abstract
- Metal-insulator-silicon-insulator-metal waveguides are experimentally investigated. Their fabrication process is explained, and their measured characteristics are discussed. Their measured propagation loss is 0.262 (0.219) dB/μm when the width of silicon is ~156 (~183) nm.
- Publisher
- Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2012
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