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Lee, Jongwon
Nanostructured Photonic Devices Lab.
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Geometric Effects of Nanocrystals in Nonvolatile Memory Using Block Copolymer Nanotemplate

Author(s)
Lee, JongwonRyu, Seong-WanShin, Dong OkKim, Bong HoonKim, Sang OukChoi, Yang-Kyu
Issued Date
2009-06
DOI
10.1016/j.sse.2009.03.007
URI
https://scholarworks.unist.ac.kr/handle/201301/17230
Fulltext
http://www.sciencedirect.com/science/article/pii/S0038110109000690
Citation
SOLID-STATE ELECTRONICS, v.53, no.6, pp.640 - 643
Abstract
This study describes geometric characteristics of a nonvolatile memory (NVM) device with a designed chromium (Cr) nanocrystal (NC) floating gate. By using a block copolymer (BCP) nanotemplate as a mask layer, cone-shaped NCs and disc-shaped NCs were formed. It Was found that the NVM device using the cone-shaped NC had a better program efficiency than that of the device using the disc-shaped one. This trend was verified by a theoretical model, which considered an effect of the capacitive-coupling ratio between a control gate and a NC floating gate. (C) 2009 Elsevier Ltd. All rights reserved.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
ISSN
0038-1101

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