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Park, Lee Soon
School of Materials Science and Engineering
Research Interests
  • Flexible OLED new materials, process and fabrication
  • Touch Screen Panel(TSP) new materials and process new materials and process
  • Nano-materials synthesis and application (Ag nano-wire and metal mesh electrode)

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화학센서 : 사진식각법을 이용한 FET 형 용존 CO2 센서의 수화젤막 및 가스 투과막 제작

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Title
화학센서 : 사진식각법을 이용한 FET 형 용존 CO2 센서의 수화젤막 및 가스 투과막 제작
Author
Park, Lee SoonKim, Sang TaeKoh, Kwang-Nak
Issue Date
1997-05
Publisher
한국센서학회
Citation
센서학회지, v.6, no.3, pp.207 - 2013
Abstract
FET type dissolved carbon dioxide(pCO₂) sensor with a double layer structure of hydrogel membrane and CO₂ gas permeable membrane was fabricated by utilizing a H^+ ion selective field effect transister(pH-ISFET) with Ag/AgCl reference electrode as a base chip. Formation of hydrogel membrane with photo-crosslinkable PVA-SbQ or PVP-PVAc/photosensitizer system was not suitable with the photolithographic process. Furthermore, hydrogel membrane on pH-ISFET base chip could be fabricated by photolithographic method with the aid of N,N,N`,N`-tetramethyl ethylenediamine(TED) as O₂ quencher without using polyester film as a O₂ blanket during UV irradiation process. Photosensitive urethane acrylate type oligomer was used as gas permeable membrane on top of hydrogel layer. The FET type pCO₂ sensor fabricated by photolithographic method showed good linearity (linear calibration curve) in the range of 10^(-3)∼10 mole/ℓ of dissolved CO₂ in aqueous solution with high sensitivity.
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ISSN
1225-5475
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