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Kang, Hyun-Wook
3D Biofabrication Lab (3BL)
Research Interests
  • 3D Bioprinting, tissue engineering and regenerative medicine, Body-on-a-chip

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Development of Rapid Mask Fabrication Technology for Micro-abrasive Jet Machining

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Title
Development of Rapid Mask Fabrication Technology for Micro-abrasive Jet Machining
Other Titles
미세입자 분사가공을 위한 쾌속 마스크 제작기술의 개발
Author
Lee, Seung PyoLee, In HwanCHO, DONG-WOOKo, Tae JoKang, Hyun Wook
Issue Date
2008-11
Publisher
Korean Society for Precision Engineering
Citation
Journal of the Korean Society for Precision Engineering, v.25, no.1, pp.138 - 144
Abstract
Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (μ-AJM) has become a useful technique for micro-machining of such materials. The μ-AJM process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the μ-AJM process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the μ-AJM. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully
URI
https://scholarworks.unist.ac.kr/handle/201301/13342
URL
http://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART001209172&locale=en&SID=U278MC5OPZAlH6VbDaQ
ISSN
1225-9071
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BME_Journal Papers
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