Showing results 1 to 5 of 5
Issue Date | Title | Author(s) | Type | View |
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2005-04 | A novel method for the fabrication of high-aspect ratio C-MEMS structures | Wang, CL; Jia, GY; Taherabadi, LH; Madou, Mark | ARTICLE | 477 |
2004 | C-MEMS for the manufacture of 3D microbatteries | Wang, CL; Taherabadi, L; Jia, GY; Madou, Mark; Yeh, YT; Dunn, B | ARTICLE | 649 |
2005 | Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media | Park, BY; Taherabadi, L; Wang, CL; Zoval, J; Madou, Mark | ARTICLE | 551 |
2005-04 | From MEMS to NEMS with carbon | Wang, CL; Madou, Mark | ARTICLE | 484 |
2006-05 | Polymer actuator valves toward controlled drug delivery application | Xu, H; Wang, C; Wang, CL; Zoval, J; Madou, Mark | ARTICLE | 522 |